Abstract
rf-Magnetron sputtered LiNiVO 4 thin film was used as a negative electrode for lithium microbatteries applications. Their film composition and thickness were analyzed by Rutherford backscattering spectroscopy (RBS) and nuclear reaction analysis (NRA) technique by using 4He +, 7Li(p α) 4He reaction respectively. The structure, surface roughness and homogeneity of these films have been investigated by X-ray diffraction (XRD), atomic force microscopy (AFM) and auger electron spectroscopy (AES) techniques. The amount of lithium inserted into the LiNiVO 4 films was analyzed by RBS and NRA studies. The results are comparable to those obtained from the electro-analytical technique (galvanostatic method), indicating that ion beam techniques are complementary tools for the analysis of lithium metal oxide thin films.
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More From: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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