Abstract
Closed silicon V grooves are proposed as new hollow waveguides suitable for optical microelectromechanical systems applications. These easily fabricated guides with large index contrast could be designed to work with very low loss for the fundamental mode. A ray optics model is developed for the loss analysis of such guides. The model is tested using the beam propagation method. The model allows one to obtain approximate design equations for the fundamental mode losses in equilateral triangles as well as the practical waveguide and thus greatly simplifies the design effort.
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