Abstract
This dataset contains the raw data used for the figures in the paper Debnath K, Khokhar A, Reed G, Saito S. Low-loss silicon slot waveguide realized by surface roughness reduction. In 2016 IEEE 13th International Conference on Group IV photonics (GFP). Piscataway, US: IEEE. 2016. Available from DOI: 10.1109/GROUP4.2016.7739069Abstract: We demonstrate low-loss slot waveguides on silicon-on-insulator (SOI) platform. Waveguides oriented to the direction on the Si (110) plane are fabricated by a combination of dry and wet etching to realize propagation loss of 4dB/cm for a waveguide with a slot width of 120nm.
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