Rate coefficients for $$\hbox {Ar}^{{\mathbf {+}}}$$ in $$\hbox {Ar/BF}_{{\mathbf {3}}}$$ mixtures

Abstract

In this paper, we present most probable reactions of $$\hbox {Ar}^{{+}}$$ ion with $$\hbox {Ar/BF}_{{3}}$$ mixtures. Appropriate gas phase enthalpies of formation for the products were used to calculate scattering cross section as a function of kinetic energy. These data are needed for modeling in numerous applications of technologically important $$\hbox {BF}_{{3}}$$ discharges. Results for transport parameters, specially rate coefficients as a function of E/N (E-electric field; N-gas density) were obtained by using the Monte Carlo technique.