Rapid-thermal-processing-based intrinsic gettering for nitrogen-doped Czochralski silicon

Abstract

In order to optimize the intrinsic gettering (IG) process based on the rapid thermal processing (RTP) for nitrogen-doped Czochralski (NCZ) silicon wafer, the effects of RTP and the following nucleation anneal on oxygen precipitation in NCZ silicon and conventional CZ silicon wafers have been comparatively investigated. It was found that, for NCZ silicon, the RTP at enough high temperature (e.g., 1250°C) was necessary for generation of high density of bulk microdefects (BMDs) in the subsequent anneals despite the nitrogen enhancement effect on oxygen precipitation. With enough high concentration of vacancies introduced by the RTP at 1250°C, for the conventional CZ silicon wafer, the vacancy enhancement effect on the nucleation of oxygen precipitates was most significant at 800°C; while for NCZ silicon wafer, the vacancies and nitrogen atoms coacted most remarkably to nucleate the oxygen precipitates during the ramping anneal from 800to1000°C. It was further found that the doped nitrogen is superior to the vacancy to enhance the nucleation of oxygen precipitates at temperatures of 900–1000°C. Moreover, in order to maximize the density of BMDs, the RTP-based IG process for NCZ silicon wafer should be different from that for the conventional CZ silicon wafer.