Abstract
LiPON films have been produced by nitrogen ion beam assisted deposition (IBAD) of thermally evaporated This process allowed us to rapidly deposit X-ray amorphous LiPON films with densities close to that of the handbook value for high ionic conductivity electronic conductivity smaller than and an electrochemical stability window of over 6.0 V. These properties, combined with the high deposition rates that can be achieved with this process make it an attractive candidate for industrial production of LiPON thin films for Li-ion batteries. © 2002 The Electrochemical Society. All rights reserved.
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