Abstract
Thermal decomposition of YBa2Cu3O7-δ (YBCO) films derived by diethanolamine (DEA)-modified trifluoroacetic acid-metal organic deposition (TFA-MOD) was investigated with respect to the understanding of the correlation between the stress releasing and rapid decomposition. It is revealed that the evaporation of DEA and the decomposition of precursor films occur simultaneously. A pyrolysis time as 20 seconds is optimal to keep the proper amount of DEA which prevents the films from severe stress during the pyrolysis. Then smooth surface of resultant films appears. In case of a pyrolysis time longer than 40 s, cracks emerge in the films accompanied with complete evaporation of DEA and appearance of Cu-rich particles, while films with pyrolysis time shorter than 10s is excessively soft, with large amount of DEA and TFA remaining in the film, implying insufficient pyrolysis.
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