Abstract
The tetrahedral amorphous carbon (ta-C) films deposited by filtered cathodic vacuum arc (FCVA) technique contain very high sp 3 fraction. However, the high compressive stress of the ta-C films causes film delamination and limits its potential applications. Stress reduction by incorporating a small percentage of a metallic element such as Al has been reported. In this work, we investigate the rapid thermal annealing (RTA) of Al containing amorphous carbon (a-C:Al) films. The results are compared with that of ta-C films. The microstructure and surface morphology of the films subjected to different annealing temperature were studied by Raman spectrometer and atomic force microscope (AFM), respectively. Some mechanisms were suggested to explain the stress reduction of the films that were subjected to different annealing temperatures. Complete stress relief was observed when the a-C:Al (5 at.%) films were RTA at 800 °C for duration of 2 min.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
