Abstract
Microwave-assisted chemical bath deposition (CBD) is a newly developed technique for fast growth of single-crystalline ZnO nanorods in a solution containing zinc nitrate at temperature below 100°C. ZnO nanorods have many applications for devices, however, semipolar oriented ZnO nanorods have been rarely reported. In this study, epitaxial growth of well-aligned arrays of inclined semipolar ZnO nanorods on a ZnO seed layer on m-plane sapphire substrates is successfully fabricated by using microwave-assisted chemical bath deposition for 10 min at 90 °C. TEM analysis reveals that The ZnO nanorods have an inclined angle about 30° with m-sapphire surface and an average length about 500 nm which gives a growth rate of 3 μm/h. Micro-photoluminescence measurements show that ZnO nanorods are of a reasonably good quality.
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