Abstract
Rapid prototyping of micrometer-sized aluminum electrodes on glass and sensitive polymers such as poly(dimethylsiloxane) and SU-8 using a flexible, inexpensive, one-step lithography process is demonstrated. The electrodes are patterned by low-power laser-assisted corrosion in pure water on a setup operating in common laboratory conditions. Multilayered electrode structures in SU-8 are fabricated, taking advantage of the intrinsic three-dimensional processing capability of laser machining and thick film techniques developed for polymer-based microsystems. Different electrode layers are connected via holes drilled through the intermediate polymer by laser ablation in air and subsequent metallization. The prototyping and successful testing of an asymmetric electrode array for electrohydrodynamic pumping is demonstrated and evidence of correct electrode operation is provided.
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