Abstract
We present proof-of-concept devices to validate the suitability of high-resolution stereolithography fabrication, polymer material properties, and increased design freedom for realizing 3D phononic crystals. The maskless, single-step technology enables the fabrication of freeform 3D microstructures with high accuracy, which allows rapid prototyping of novel designs and leads to fast optimization cycles. Experimental results for devices with feature sizes down to 100 μm successfully indicate phononic band gap behavior, which is required for applications as sensor and microsystem structures.
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