Abstract
Fourier ptychographic microscopy (FPM) is a promising phase retrieval algorithm that does not need interferometry. Recently, reflective FPM has been highlighted as a measuring method for surface inspection in the industry, but using it is challenging because of the limited speed of the conventional misalignment correction methods. Here, we propose a new misalignment correction method to overcome this limitation by using additional 4f imaging and modifying the conventional misalignment method. As a result, about 1 mm2 (8095 × 8095) wide field of view image was reconstructed within 980.3 s.
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