Rapid laser patterning and crystallization of 2D materials on rigid and flexible substrates

Abstract

Two-dimensional (2D) materials have been viewed as a promising candidate for future electronic, optoelectronic, and photonic applications. This, however, demands controlled synthesis and precise integration of such materials with complex patterns onto rigid and flexible substrates. Here we introduce a new laser-based approach that enables the integration of 2D materials onto the flexible and rigid substrate with desired shapes and patterns. We report direct laser crystallization and the pattering of MoS₂ and WSe₂ on PDMS and quartz substrates. A thin layer of solid-state stoichiometric amorphous 2D film is deposited onto the substrates, followed by a controlled crystallization and direct writing process using a tunable nanosecond laser (1064 nm). This novel method enables the use of emerging 2D materials in future electronics, optoelectronics, and photonics applications where intricate patterning and/or flexible substrates are required.