Abstract
Two-photon photopolymerization (TPP) of femtosecond laser is apromising method to fabricate three-dimensional woodpile photoniccrystals (PCs). We build micro-fabrication system based on theprinciple of TPP. Three-dimensional woodpile PCs consisting of in-planerod distances ranging from 1000 nm to 2000 nm are fabricated by focusingfemtosecond laser in photosensitive liquid resin ORMOCER. Theproperties of the PCs are also discussed, and fundamental photonic bandgaps in middle-infrared range are measured, whose in-plane roddistances are 1500 nm and 2000 nm. Three-dimensional woodpile PC deviceswith desired defects, such as cross-waveguide and micro-laserstructures, are introduced easily by TPP. We fabricate thethree-dimensional woodpile PCs in the liquid resin at the fast scanningspeed of 120 μm/s.
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