Abstract
Abstract a -Axis- and c -axis-oriented YBa 2 Cu 3 O 7– δ (YBCO) films were grown on (100) SrTiO 3 substrate by laser chemical vapour deposition (laser CVD). The effect of lattice mismatch between films and substrates on in-plane and out-of-plane crystallinity and critical temperature ( T C ) was investigated. The preferred orientation changed from a -axis to c -axis as the deposition temperature increased from 928 to 1049 K. The c -axis-oriented YBCO showed a minimum of full width at half maximum of 0.5° for the ω-scan and 1.0° for the φ-scan. A smaller mismatch between YBCO films and substrates led a higher crystallinity for in-plane and out-of-plane epitaxial growths. A high T C of 90 K was obtained for the c -axis-oriented YBCO films. The deposition rate of the YBCO films was 58–101 μm h −1 , approximately 60–1000 times higher than that of conventional CVD.
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