Abstract

The optical path calibration process using a laser interferometer is time-consuming and tedious, requiring repeated adjustment and experienced operators, leading to a significant reduction in measuring efficiency. A novel optical path calibration process of the linear axis of a three-axis machine tool using a Renishaw XL-80 laser interferometer is proposed in this paper. The homogeneous coordinate transformation error model of the measured axis is established. Using the established error model, only the initial distance from the laser transmitter to the beam splitter and the initial distance from the beam splitter to the linear mirror are required to accurately calibrate the laser beam. The relationship between the fixed distance from the center of the light target to the quarter point on the edge of the light target and the movement distance of the measured axis are obtained. Eight deviations of the optical path affected by the laser transmitter, the beam splitter and the linear mirror are solved. Calibrations based on the deviations can be achieved by adjusting the positions and orientations of the laser interferometer components, leading to a rapid and accurate calibration method for measuring the optical paths.

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