Abstract
We report the formation of solid-state nanopores using a scanning helium ion microscope.The fabrication process offers the advantage of high sample throughput along with finecontrol over nanopore dimensions, producing single pores with diameters below 4 nm.Electronic noise associated with ion transport through the resultant pores is found to becomparable with levels measured on devices made with the established techniqueof transmission electron microscope milling. We demonstrate the utility of ournanopores for biomolecular analysis by measuring the passage of double-strand DNA.
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