Abstract
This paper presents a theoretical analysis and simple expressions for the calculation of ranges and standard deviations of implanted ions in amorphous targets. Nuclear energy loss models are discussed to introduce an approximation formula for the nuclear stopping cross section appropriate for Thomas-Fermi, Lenz-Jensen and intermediate type potentials. The Firsov electronic stopping model has been used to show its successful application. Algebraical expressions for the total range of ions in monoatomic and biatomic targets as a function of ion energy result from the considerations presented. A quasi-elastic multiscattering model is suggested, which permits an easy estimate of projected ion ranges. The standard range deviation is obtained by determining the total average-square energy loss fluctuations. Finally a comparison of calculated and experimental results is made to show that calculations based on the Firsov electronic stopping model and the nuclear stopping cross section proposed here provide a better agreement with the experimental results than the wellknown Johnson-Gibbons LSS-calculations.
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