Abstract

The available experimental range and range profiles are compared with theoretical predictions based on different models for the electronic stopping cross-section. Implantation energies from 0.1 to 10 MeV are considered. In the entire energy range, the best agreement between the experimental data and the calculations is achieved for a combination of the Lindhard-Scharff and the Bethe-Bloch electronic stopping formulae using the empirical parameter C k = 1.2 .

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