Random Vibration Fatigue Analysis of Base In Macro-micro Motion Platform

Abstract

The vibration of the macro and micro moving platform will affect the positioning accuracy of the platform and the service life of key components. The base of the macro and micro motion platform is located below the voice coil motor, which is most affected by the vibration generated by the voice coil motor. In this paper, the finite element analysis method is adopted to carry out research on the base of ultra-high acceleration macro and a micro-motion platform. Firstly, a three-dimensional model is built in SolidWorks and imported into ANSYS Workbench to achieve co-simulation. Secondly, the modal analysis of the base model is carried out to obtain the first six natural frequencies and mode shapes. The first natural frequency is much higher than the driving frequency of the voice coil motor to avoid the resonance of the system. Then, the harmonic response analysis was carried out. According to the analysis results, the acceleration spectral density (PSD) and the material S-N curve, the random vibration fatigue analysis of the base is carried out, and the lowest life point and position distribution of the base are obtained. In this paper, the research on the base of the ultra-high-speed macro-micro motion platform provides a certain guidance for the platform’s research on key components and provides theoretical support for the platform’s ultra-precision positioning.