Abstract
In this paper the effect of thickness errors on the reflectance of multilayer is investigated. Using the matrix method, we deduced an expression for describing the dependence of reflectance on the film thickness errors. It is found that the degree of the thickness error-effect is affected by the ratio of low refractive index with high refractive index and the number of layer of multilayer. The computer simulations show that the degree of this effect is very small when the ratio is small and the number of layer is large. The thickness error hardly influences the reflectance of short-wave multilayer.
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