Abstract

Kinetics of the adsorption process with diffusional relaxation is studied by Monte Carlo simulation on a square lattice. Depositing objects are squares covering nine lattice sites. At each Monte Carlo step, adsorption is attempted with probability P a and diffusion with probability P dif =1− P a . In the case of low diffusion probabilities, the blocking of the available substrate area characteristic for RSA processes is observed, but the “jamming coverages” have larger values than in the case of pure RSA processes. On the contrary, in the case of high diffusion probabilities, there is no blocking and the whole substrate area is available for the adsorption.

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