Abstract
Linear phased arrays enable simultaneous tunable focusing and scanning. Using an electrostatically actuated, high-speed linear phased array of MEMS mirrors, we demonstrate cylindrical focusing with 90% optical efficiency up to 0.008 numerical aperture (NA) with simultaneous beam steering. Single focus scanning is demonstrated up to an NA of 0.013, at which point the focus splits, creating a multifocal response. The array refresh rate is only limited by the speed of the elements, allowing random-access axial and lateral scanning up to 350 kHz.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
