Abstract
An extended version of cross-bar type addressing technique is developed for three-port electrostatic micro shutters arranged in an arrayed format. A microelectromechanical systems (MEMS) shutter blade suspended by a pair of torsion beams works as a movable electrode that is either attracted upwards to the cover plate to close the aperture or retracted downwards into the through-hole to open it. Tri-state positioning of the shutter—i.e., open, rest, and close—is controlled by the hysteresis loop of the electrostatic pull-in and release behavior using the combination of the voltages applied to the shutter, the cover, and the substrate. Random access addressing of the shutters is demonstrated by a control system composed of MATLAB-coded Arduino electronics. The shutter array developed in this work is for a sub-cluster of a reconfigurable shutter array under development for a multi-object galactic astronomy.
Highlights
As an endeavor to understand the history of the universe, three dimensional maps of galaxies are being constructed using their distances estimated by the Doppler redshifts of emission lines.Multi-object spectrograph (MOS) is a powerful tool for such galactic astronomy because of its parallelism of spectroscopy analysis
Conventional MOS uses a metallic masking plate with multiple slit holes whose positions are made to match with the constellation patterns of target astronomical bodies; MOSs of this type have been implemented in the Faint Object Camera and Spectrograph (FOCAS) of the Subaru Telescope [1], DEep Imaging Multi-Object Spectrograph (DEIMOS) of the Keck
Multi-Object Spectrograph (MOS) Shutter Array showing through an opening of 80 × 950 μ m in area made in the cover plate
Summary
As an endeavor to understand the history of the universe, three dimensional maps of galaxies are being constructed using their distances estimated by the Doppler redshifts of emission lines. The electrostatic actuation has been chosen for shutter addressing rather than a scanned magnet [13,21] Another option for MEMS shutter was a roll-blind mechanism [22,23] that curls up as an initial state due to the difference of thermal expansion coefficients of the layered materials. 2. Multi-Object Spectrograph (MOS) Shutter Array showing through an opening of 80 × 950 μ m in area made in the cover plate. The temporal passivation layer Parylene-C was removed in an O2 plasma to release the shutter structures to be movable
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