Abstract
While metamaterials offer engineered static optical properties, future artificial media with dynamic random-access control over shape and position of meta-molecules will provide arbitrary control of light propagation. The simplest example of such a reconfigurable metamaterial is a nanowire grid metasurface with subwavelength wire spacing. Recently we demonstrated computationally that such a metadevice with individually controlled wire positions could be used as dynamic diffraction grating, beam steering module and tunable focusing element. Here we report on the nanomembrane realization of such a nanowire grid metasurface constructed from individually addressable plasmonic chevron nanowires with a 230 nm × 100 nm cross-section, which consist of gold and silicon nitride. The active structure of the metadevice consists of 15 nanowires each 18 μm long and is fabricated by a combination of electron beam lithography and ion beam milling. It is packaged as a microchip device where the nanowires can be individually actuated by control currents via differential thermal expansion.
Highlights
Fig2b.tif: Nanoscale gold contacts and gold areas for testing and metadevice fabrication made by ebeam lithography
We make the full versions of the cropped scanning electron micrographs shown in the manuscript available
Light grey areas show 50-nm-thick gold on 50-nm-thick silicon nitride, dark areas show the 50-nm-thick silicon nitride membrane, except in between the nanowires, where silicon nitride was removed to separate the nanowires from each other
Summary
Fig2b.tif: Nanoscale gold contacts and gold areas for testing and metadevice fabrication made by ebeam lithography. Random access actuation of nanowire grid metamaterial The manuscript contains all information required to reproduce the results that it contains.
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