Abstract
ABSTRACTSputter deposited TiO2 and ZrO2 films on silica have been characterized with regard to thickness, phase purity, and residual film stress using nondestructive Raman spectroscopic techniques. Irradiated anatase coatings exhibit vibrational features that irreversibly shift to higher frequencies, suggesting an increase in localized stress. Catastrophic damage is manifested by the appearance of a higher density rutile phase. Rutile coatings examined after irradiation show only intensity changes, while amorphous coatings were found to rapidly crystallize under high-pulse energy irradiation. Results of these studies are compared with equilibrium Raman measurements of thermally-induced transformations in these materials.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
