Abstract
Ultraviolet (UV) and visible micro-Raman-scattering spectroscopy were used to study carbon nitride films deposited using an off-plane double-bend-filtered cathodic vacuum-arc (FCVA) technique combined with a radio-frequency nitrogen-ion source, which was used to supply active nitrogen species during the deposition of carbon nitride films. The UV Raman spectra can be directly used to determine the sp3 C atoms in carbon nitride films. Both C-N bonds and C≡N bonds can also be observed from the deconvolution results of visible and UV Raman spectra for carbon nitride films. The increase of nitrogen-ion energy leads to a decrease of the sp3 C fraction, and an increase of the sp2 C fraction, the sp2 C cluster size, the C-N bond fraction and the C≡N bond fraction in carbon nitride films.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Applied Physics A Materials Science & Processing
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
