Abstract
AbstractRaman spectroscopy was used to examine the structure of polycrystalline and epitaxial barium titanium oxide thin films grown by metal-organic chemical vapor deposition. The Raman spectra confirmed the presence of the tetragonal ferroelectric phase of BaTiO3 and also revealed several other Ba-Ti-O phases. These films were also characterized by X-ray diffraction and TEM imaging. The structural information provided by the Raman spectra was qualitatively consistent with the X-ray and TEM results. The temperature dependencies of the Raman spectra of two films were examined in the range 25°C-175°C. Raman peaks due to tetragonal BaTiO3 were observed at temperatures well above 132°C, which is the tetragonal-cubic phase transition temperature for bulk single-crystal BaTiO3. This may indicate stabilization of the tetragonal phase by an anisotropic film-substrate interaction or by inter-grain stresses.
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