Abstract

Raman spectra of the diamondlike amorphous carbon (a-C) films prepared by the plasma CVD method have been measured as a function of the excitation wavelength. A Raman band centered at about 1530 cm-1 and a broad shoulder band at around 1400cm-1 are observed in the spectra excited by the 5145 A line. The spectral profile is confirmed to depend on the excitation wavelength. A comparison of the spectral profiles between the tetrahedrally (sp3) and trigonally (sp2) bonded materials suggests that the Raman bands in the a-C films originate from carbon clusters with the sp2 configuration.

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