Abstract
The decomposition of arsine was studied by Raman spectroscopy in an atmospheric pressure MOVPE system. The temperature distribution in a vertical reactor with a 2-inch susceptor was established from the rotation modes of H2 and N2. The decomposition of AsH3 in H2 took place in the temperature range 420–820 K, close to the substrate. The broadening of the observed AsH stretching vibration band of AsH3 versus temperature suggests the presence of AsHn (n<3) compounds. The simulation of AsH3 and AsH spectra at various temperatures was compared to the experimental data.
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