Abstract
The decomposition of arsine was studied by Raman spectroscopy in an atmospheric pressure MOVPE system. The temperature distribution in a vertical reactor with a 2-inch susceptor was established from the rotation modes of H2 and N2. The decomposition of AsH3 in H2 took place in the temperature range 420–820 K, close to the substrate. The broadening of the observed AsH stretching vibration band of AsH3 versus temperature suggests the presence of AsHn (n<3) compounds. The simulation of AsH3 and AsH spectra at various temperatures was compared to the experimental data.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
