Radio-frequency thermal plasma synthesis of nano-sized indium zinc tin oxide powders with reduced indium content

Abstract

A route to obtain nano-sized IZTO (Indium Zinc Tin Oxide) materials with relatively low indium content is investigated using an RF (Radio-Frequency) thermal plasma system. For this purpose, In2O3, SnO2 and ZnO with the sizes of 0.1–1μm were mixed at the cation ratios of 6:2:2 and 2:1:1, and then, injected into RF thermal plasma with a plate power level of ~26.6kVA. From the field emission scanning electron microscopy images and the transmission electron microscopy–electron energy loss spectroscopy mapping images of the as-synthesized powders, it was found that the three oxides were unified into nano-sized IZTO particles (<50nm), with each element of In, Zn and Sn uniformly distributed. In addition, X-ray diffraction data and inductively coupled plasma-optical emission spectrometry analysis results showed that the IZTO powders with a single phase of bixbyite In2O3 structure can be achieved even with an indium content of 60at.%.