Abstract
PDC (Polymer Derived Ceramics, PDC) material sensor is a new type of temperature sensor, which has the characteristics of high temperature thermal stability, corrosion resistance, oxidation resistance and creep resistance. It is a high temperature polymer precursor ceramic temperature sensitive material. Using its characteristics, it can solve the problem of high temperature. There is a resonant cavity inside the sensor, and the resonant frequency of the internal resonant cavity will change accordingly when its temperature changes. In this study, a set of RF temperature measurement hardware system was developed using the perturbation method and the corresponding relationship between the resonant frequency and temperature of the PDC material temperature sensor.
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