Radio frequency-driven proton source with a back-streaming electron dump

Abstract

This article describes an rf ion source with a back-streaming electron dump. A quartz tube, brazed to a metal plug at one end, is fused in the center of a flat quartz plate. rf power (at 13.6 MHz) is coupled to generate hydrogen plasma using a planar external antenna bonded to the window. Bonding the water-cooled rf antenna to the quartz window significantly lowers its temperature. The water-cooled metal plug serves as the back-streaming electron dump. At 1800 W, the current density of extracted hydrogen ions reaches approximately 125 mA/cm(2).