Abstract
Nanostructured TixCr1–xN coatings of various compositions 0.58 ≤ x ≤ 0.8 on the substrates made of AISI 304 stainless steel and monocrystalline silicon were formed by the method of separable vacuum-arc deposition. The elemental composition was studied by Rutherford backscattering spectrometry of helium ions. The structural-phase state and the morphology were examined by X-ray diffraction, optical and scanning electron microscopy, tribomechanical tests of the initial coatings were also carried out. The radiation tolerance of the nanostructured TixCr1–xN coatings within 0.58 ≤ x ≤ 0.8 under He+ ion irradiation with an energy of 500 keV in the fluence range of 5·1016–3·1017 ions/cm2 was studied for the first time. It was found that the TixCr1–xN coatings within 0.58 ≤ x ≤ 0.8 withstand irradiation without significant changes in the structure up to a fluence of 2·1017 ions/cm2, when a partial coating flaking (exfoliation) up to a depth of the projected range of helium ions takes place. A decrease in the average size of crystallites of coatings and the crystal lattice period reduction after radiation exposure were detected. The decrease in the microhardness of the TixCr1–xN coatings of all compositions after irradiation was found.
Highlights
Nanostructured TixCr1–xN coatings of various compositions 0.58 ≤ x ≤ 0.8 on the substrates made of AISI 304 stainless steel and monocrystalline silicon were formed by the method of separable vacuum-arc deposition
The structural-phase state and the morphology were examined by X-ray diffraction, optical and scanning electron microscopy, tribomechanical tests of the initial coatings were carried out
The radiation tolerance of the nanostructured TixCr1–xN coatings within 0.58 ≤ x ≤ 0.8 under He+ ion irradiation with an energy of 500 keV in the fluence range of 5·1016–3·1017 ions/cm2 was studied for the first time
Summary
Методом сепарируемого вакуумно-дугового осаждения сформированы наноструктурированные покрытия TixCr1–xN различных составов 0,58 ≤ x ≤ 0,8 на подложках из нержавеющей стали 12Х17 и монокристаллического кремния. Изучен элементный состав методом спектрометрии резерфордовского обратного рассеяния ионов гелия, структурно-фазовое состояние и морфология методами рентгеновской дифракции, оптической и сканирующей электронной микроскопии, проведены трибомеханические испытания исходных покрытий. Проведено исследование радиационной стойкости наноструктурированных покрытий TixCr1–xN 0,58 ≤ x ≤ 0,8 при облучении ионами He+ с энергией 500 кэВ в диапазоне флюенсов 5·1016–3·1017 ион/см. Установлено, что покрытия TixCr1–xN 0,58 ≤ x ≤ 0,8 выдерживают облучение без существенных изменений структуры до флюенса 2·1017 ион/см, при котором начинается частичный флекинг (отшелушивание) покрытий до глубины среднего проективного пробега ионов гелия. Установлено уменьшение микротвердости покрытий TixCr1–xN всех составов после облучения. Ключевые слова: наноструктурированные покрытия TiСrN, структурно-фазовое состояние, трибомеханические свойства, наноиндентирование, радиационная стойкость.
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