Abstract
PEFP(Proton Engineering Frontier Project) developed the 300 keV ion implanter for basic experiments. This facility, sponsored by ARTI (Advanced Radiation Technology Institute), was designed and manufactured for studies on a surface modification by an ion beam. Generally, in developing an ion implanter whose energy is around 300 keV or more, a shielding provision should be considered to prevent an unexpected exposure. During the development of PEFP’s 300 keV ion implanter, its shielding issue was a localization of the shielding effect and the prevention of an acceleration of the secondary electrons by using a magnetic field, because it was needed to reduce X-ray more efficiently and the weight of the shielding material as well. In this paper, localization shielding concept was adopted and also a magnetic field was placed in the middle of an accelerator tube. Consequently, through this work, we reduced not only 30% of the X-ray intensity but also the weight of the shielding materials.
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