Abstract
We study the radiation hardness of the Vertical Cavity Surface Emitting Laser diodes (VCSELs) and the epitaxial silicon PIN diodes that will be used for the Atlas SemiConductor Tracker at the CERN Large Hadron Collider. The tests were conducted with 200 MeV protons to a fluence of 4 × 10 14 p / cm 2 and with 20 MeV (average energy) neutrons to 7.7 × 10 14 n / cm 2 . The radiation damage of the VCSELs and PINs and the annealing characteristics are presented.
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