Abstract
The MALTA family of depleted monolithic pixel sensors produced in TowerJazz 180 nm CMOS technology target radiation hard applications for the HL-LHC and beyond. Several process modifications and front-end improvements have resulted in radiation hardness >1015 1 MeV neq/cm2 and time resolution below 2 ns, with uniform charge collection and efficiency across the pixel of size 36.4 × 36.4 µm2 with small collection electrode. This contribution will present the comparison of samples produced on high-resistivity epitaxial silicon with Czochralski substrates, before and after neutron irradiation, and results from MALTA2 with a new cascoded front-end flavour that further reduces the RTS noise.
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