Abstract
Based on the model of the nonlocal thermoelastic peak (NTP) the ion generalized to the case of the ion of polyatomic molecule, the acoustic effect of low-energy ion of a hydrocarbon molecule during plasma-ion deposition of diamond-like carbon coating is investigated. The generation of a stress wave takes place as a result of the combined action of mechanisms associated with the rapid transfer of energy, momentum, and additional volume to the NTP volume. The magnitude, shape, and spatial dependence of the stress pulse generated by CH4, C2H2, and C6H6 ions have been studied with absorption taken into account. The possibility of accelerating the diffusion of interstitial defects, as well as the possibility of brittle fracture of the coating at the interface with the substrate under the action of acoustic pulses from deposited hydrocarbon ions, is discussed.
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