Abstract
The fabrication of high-quality large-area thick Al films with a thickness around 10 μm or even more is one of the most important factors to realize high-performance large-size echelle gratings. During the deposition process of large-area Al films, Al film quality generally exhibits a different behavior along the radius (R) direction, which seriously affects the performance of echelle gratings. In this study, for the first time, we investigate the radial-quality uniformity of large-area (R=400 mm) thick (>10 μm) Al films in detail. We not only analyze the radial-quality difference of Al films prepared by the traditional electron-beam evaporation process, but also significantly improve the radial-quality uniformity of large-area thick Al films by using a coevaporation process. By comparing two kinds of film coating processes, we clarify the origin of the radial-quality difference of Al films, and prepare large-area thick Al films with excellent radial-quality uniformity.
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