Abstract
Both radial and spiral distortion of magnetic lens with the field distribution in the form B( z) αz n are analyzed by means of Scherzer's formula. To estimate the performance of the image in electron microscope the dimensionless quality factors (F.Z. Marai, T. Mulvey, Sherzer's formula and the correction of spiral distortion in the electron microscope, Ultramicroscopy 2 (1977) 187–192.), for both radial and spiral distortion is calculated. The results have been compared with different projector lenses.
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