Quick X-Ray Reflectometry in the Simultaneous Multiple Angle-Wavelength Dispersive Mode

Abstract

The whole profile of the specular X-ray reflectivity curve was simultaneously and quickly measured with no need to rotate the specimen, the detector or the monochromator crystal. A white synchrotron beam from a bending magnet source is incident on a bent-twisted silicon (111) crystal polychromator that produces a convergent X-ray beam with a continuously varying wavelength (energy) and glancing angle to the specimen surface. This convergent X-ray beam was specularly reflected in the vertical direction by the specimen placed at the focus. The normalized spatial distribution across the beam direction of the reflected beam represents a specular X-ray reflectivity curve because each position along the line recorded on the two dimensional detector surface corresponds to a different momentum transfer. Reflectivity curves from a (001) silicon wafer, a nickel thin film on a silicon substrate, and a water surface were measured with data collection times of 0.001-100 s, 0.01-100 s, and 1.0-1000 s, respectively. The simultaneously covered momentum transfer range was 0.03-0.52 Å−1 for solid specimens and 0-0.41 Å−1 for liquid specimen.