Abstract
The fabrication method and the pyroelectric response of a single element infrared sensor based lead zirconate titanate (PZT) particles and polyvinylidene fluoride P(VDF-TrFE) copolymer composite thick film is reported in this paper. A special thermal insulation structure, including polyimide (PI) thermal insulation layer and thermal insulation tanks, was used in this device. The thermal insulation tanks were fabricated by laser micro-etching technique. Voltage responsivity (RV), noise voltage (Vnoise), noise equivalent power (NEP), and detectivity (D*) of the PZT/P(VDF-TrFE) based infrared sensor are 1.2×103V/W, 1.25×10−6VHz1/2, 1.1×10−9W and 1.9×108cmHz1/2W−1 at 137.3Hz modulation frequency, respectively. The thermal time constant of the infrared sensor τT was about 15ms. The results demonstrate that the composite infrared sensor show a high detectivity at high chopper frequency, which is an essential advantage in infrared detectors and some other devices.
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