Abstract
Very quick response of less than 1 msec rotation is obtained with the development of a small-sized 17 mm diameter ultrasonic motor. This motor is driven by the mechanical vibration excited on the disk plate by piezoelectric ceramics.The observed response time in starting is 0.57 msec and the time in stopping is 0.33 msec at the no-load revolution speed of 700 rpm. These results coincide well with the calculation of the response time based on the experimental results between revolution speed and torque.
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