Abstract
A quick imaging technique of near-infrared transmittance has been developed to assess both macroscopic and microscopic homogeneities in VCZ-grown S-doped InP substrates with the large diameters up to 4 inches. In addition to homogeneity assessment of substrates with various diameters, an asymmetric pattern, reflecting the asymmetric shape of solid-liquid interface, as well as a steep striation pattern due to fluctuation of growth speed are observe in a large diameter substrate.
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