Abstract
Uniaxial electrostatically driven micromirrors with very large non-resonant rotation angles are presented. The mirrors achieve an analog deflection of about ±12° at voltages between 200 and 320V. At pull-in, a digital tilt angle of approx. ±21° is found. A mirror control for a nearly linear characteristic curve, by using a counter torque is approved. The key for large quasi-static deflections are novel aluminum nitride based thin film springs. The high mechanical strength of AlN enables the fabrication of thin but stable torsion springs. The mirror has a size of 1mm×1.2mm with a bending of less than 0.2μm and high surface quality (Ra<2nm). The rotational eigenfrequencies are found to be between 37 and 73Hz and the eigenfrequencies of the vertical mirror movement are between 1235 and 1751Hz.
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