Abstract
Radio-frequency (rf) driven multicusp ion sources developed at the Lawrence Berkeley National Laboratory use an internal induction coil (antenna) for plasma generation. The copper rf-antenna with a thin layer of porcelain coating, which is presently used, cannot fully satisfy the increasing demands on source cleanliness and antenna lifetime under high power cw or pulsed operation in applications where water cooling is not possible. A quartz antenna has been designed and operated in the multicusp ion source. It has been demonstrated that the overall performance of the new antenna exceeds that of the regular porcelain-coated antenna. It can be operated with a long lifetime in different discharge plasmas. The quartz antenna has also been tested at the Paul Scherrer Institute for cw source operation at rf power higher than 5 kW. Results demonstrated that the antenna can survive under dense plasma discharge operations.
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