Abstract
We have developed a structural refinement method which allows the quantitative determination of structural disorder in superlattices. We present first a number of model calculations which give counterintuitive results. One such model calculation implies that structural disorder broadens diffraction line widths contrary to naive expectation. This then forms the basis for structural refinement in which the detailed line shapes are fit to obtain a quantitative determination of a variety of disorder parameters. The parameters obtained from the refinement were found to be in good quantitative agreement with other independent determinations.
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