Abstract
AbstractIn order to overcome the poor quantitativeness of conventional SIMS, sputtered neutral mass spectrometry (SNMS) employing non‐resonant laser post‐resonant laser post‐ionization has been studied. By studied. By combining a time‐of‐flight (TOF) analyzer with a powerful excimer laser, it was confirmed that non‐resonant laser post‐ionization is capable of quantitative analysis of impurities at the pm level. On comparing laser wavelengths, 193 nm (ArF) gave a higher post‐ionization efficiency than 248 nm (KrF). It was also demonstrated that the electronegative element sulphur can be detected as positive ions by post‐ionization. Furthermore, surface metallic contaminants in a small area (250 μm square) could be determined down to 1011 atoms cm−2.
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