Abstract
The recently appeared distorted wave Born approximation formalism is used for quantitative determination of interface roughness replication and lateral correlation length in periodical multilayered structures. The results obtained from x-ray diffraction are in very good agreement with analysis of cross-section transmission electron micrographs. We interpret transparently the obtained parameters and demonstrate the ability of the low-angle x-ray diffraction methodology for nondestructive and quantitative studying of interface roughness in magnetic multilayers.
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