Abstract
We present a free and a constrained fitting procedure for quantitative signal extraction of nanomechanical systems in the dynamic range and for physical model testing. We demonstrate that applying the free-fitting procedure to the measured frequency response of silicon nitride (SiN) nanomembranes at varying pressure enables us to disentangle the intrinsic membrane vibration properties from the system response, thereby giving quantitative access to the eigenfrequency, quality factor, coupling strength between resonator and drive system, and to system noise. The validity of physical models for quantities such as excitation, fluctuations, and damping mechanisms can be verified by imposing additional mathematical links between different physical parameters as constraints in the constrained fitting procedure. We verify the performance of the constrained fitting procedure for the same samples tested in various experimental setups.
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